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2009

2. Fabrication of Metal Suspending Nanostructures by Nanoimprint Lithography (NIL) and Isotropic Reactive Ion Etching (RIE)

GY Xie*, J Zhang, YY Zhang, YY Zhang, T Zhu, ZF Liu*

Sci. China Ser. E-Tech. Sci., 52(2009)1181-1186

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